| 发明名称 |
System and method for processing semiconductor material using radiant energy source |
| 摘要 |
A system and method for processing a semiconductor material out-gassing a gas including a radiant energy source arranged to expose the semiconductor material to energy to decompose the gas and a sensor to sense a parameter of processing such that the radiant energy source is controlled based upon the sensed parameter information.
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| 申请公布号 |
US2006127293(A1) |
申请公布日期 |
2006.06.15 |
| 申请号 |
US20060348712 |
申请日期 |
2006.02.07 |
| 申请人 |
|
发明人 |
VENDITTI CHARLES E.;DEVANY CHRISTOPHER M.;THOMPSON ERIC E.;SKINNER GARY W.;GRIFFITHS DAVID A. |
| 分类号 |
B01D53/68;B01D53/50;B01D53/70;F01N3/20 |
主分类号 |
B01D53/68 |
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代理人 |
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| 地址 |
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