| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating film forming apparatus which enables the easy deposition of a coating with a uniform thickness even on an object material to be coated which has a diameter changed along the axial core direction. SOLUTION: The coating film forming apparatus 1B comprises a holding part 18 for holding a substrate 4, an application nozzle 19 for discharging a coating material 7 toward the outer circumferential face 4c of the substrate 4, and gas jetting means of changing the discharge direction of the coating material 7 by jetting a gas toward the coating material 7 discharged in a conical state from the application nozzle 19, and a control device. The gas jetting means comprises a gas storage chamber 44 formed circularly in the entire circumference of an application nozzle 19 and storing a gas and a second slit 45 communicated with the gas storage chamber 44 and opened in the entire circumference of the inner face 30 of the application nozzle 19 for jetting a gas, and a gas supply unit for sending compressed gas to the gas storage chamber 44. Further, the control device controls the flow rate of the gas to be jetted from the second slit 45 in accordance with the interval CG between the substrate 4 and the application nozzle 19. COPYRIGHT: (C)2008,JPO&INPIT
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