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发明名称
摘要
申请公布号
JP4403289(B2)
申请公布日期
2010.01.27
申请号
JP20030050983
申请日期
2003.02.27
申请人
发明人
分类号
H01L21/8234;H01L21/8247;H01L27/088;H01L27/10;H01L27/115;H01L29/739;H01L29/78;H01L29/788;H01L29/792
主分类号
H01L21/8234
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代理人
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地址
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