发明名称 BONDING WIRE FOR SEMICONDUCTOR DEVICES
摘要 PROBLEM TO BE SOLVED: To provide a bonding wire which enables the reduction in occurrence of an abnormal loop.SOLUTION: A bonding wire for semiconductor devices comprises: a core material including more than 50 mol% of a metal M; an intermediate layer formed on the surface of the core material, and including Ni, Pd, the metal M and inevitable impurities, in which the concentration of Ni is 15-80 mol%; and a coating layer formed on the intermediate layer, and including Ni, Pd and inevitable impurities, in which the concentration of Pd is 50-100 mol%. The metal M is Cu or Ag. The concentration of Ni in the coating layer is lower than that in the intermediate layer.
申请公布号 JP2015119004(A) 申请公布日期 2015.06.25
申请号 JP20130260563 申请日期 2013.12.17
申请人 NIPPON STEEL SUMIKIN MATERIALS CO LTD;NIPPON MICROMETAL CORP 发明人 UNO TOMOHIRO;HAGIWARA YOSHIAKI;OYAMADA TETSUYA;ODA TAIZO
分类号 H01L21/60;C22C5/06;C22C5/08;C22C9/06 主分类号 H01L21/60
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