| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for purifying an organic silane, capable of efficiently separating low boiling point component impurities in the organic silane and safely obtaining the highly pure product. SOLUTION: This method for purifying an organic silane comprises cooling the organic silane represented by the general formula: RnSiH4-n [(n) is 1, 2 or 3; R is an alkyl group or an aryl group]} containing impurities consisting mainly of low boiling point components, evacuating in the solidified state, and further repeating the processes.
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