发明名称 |
Electromechanical system having a controlled atmosphere, and method of fabricating same |
摘要 |
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a technique of fabricating or manufacturing MEMS having mechanical structures that operate in controlled or predetermined mechanical damping environments. In this regard, the present invention encapsulates the mechanical structures within a chamber, prior to final packaging and/or completion of the MEMS. The environment within the chamber containing and/or housing the mechanical structures provides the predetermined, desired and/or selected mechanical damping. The parameters of the encapsulated fluid (for example, the gas pressure) in which the mechanical structures are to operate are controlled, selected and/or designed to provide a desired and/or predetermined operating environment. <IMAGE> |
申请公布号 |
EP1460038(A2) |
申请公布日期 |
2004.09.22 |
申请号 |
EP20040101108 |
申请日期 |
2004.03.18 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
KRONMUELLER, SILVIA;LUTZ, MARKUS;PARTRIDGE, AARON |
分类号 |
B81C1/00;B81B3/00;B81B7/00;B81B7/02 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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