| 摘要 |
PROBLEM TO BE SOLVED: To provide the processing apparatus which can prevent a contact causing a particle generation, and a crash and slide causing a damage in case of lifting and falling of a push-up pin. SOLUTION: A push-up pin 311 is fitted into plural insertion holes 312 provided on a loading table 202 which load a wafer W. As to the push-up pin 311, its upper end face is flat and a fitting hole 314 is formed within a range not to pierce on its lower end. An upper end part of drive pin 315 for positioning is inserted into the fitting hole 314 and a lower end of drive pin 315 is fixed in the state of piercing the push-up member 316. The outer diameter of the push-up pin 311 is slightly smaller than the inner diameter of the insertion hole 312 so as to get a slight gap 313. A space S1 between a back surface of the wafer W and an upper surface of the loading table 202 communicates with a space S2 in the back side (the lower part) of the loading table 202 through the gap 313 in the pin insertion hole 312. COPYRIGHT: (C)2006,JPO&NCIPI
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