MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently provide a semiconductor device that has a microcrystal semiconductor with uniform behavior, and also to provide a high-quality electronic device. SOLUTION: Semiconductor layers are formed onto a substrate having an insulating surface, and a pulse laser beam with light intensity strong enough for a semiconductor layer to be completely melted is irradiated, thereby forming a microcrystal semiconductor region. This will enable a semiconductor device to be manufactured which has a microcrystal semiconductor region with uniform behavior, and by using it, a high-quality electronic device is provided. COPYRIGHT: (C)2009,JPO&INPIT