| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the labor of the assembling operation of a processor for carrying out processing by moving a beam member. <P>SOLUTION: A processing tool 41 is mounted on a beam member 40 of a substrate processor 1, and a first support block 32 and a second support block 33 are fixed to the both ends of the Y direction of the beam member 40. Also, a guide member 31 is fixed to a stage 3 of the substrate processor 1. The first support block 32 is engaged with a guide member 31 so that the moving direction of the beam member 40 can be controlled so as to be turned into an X axial direction, and a second support block 33 is configured of a, so called, static pressure bearing so that the end side of the (-Y) direction of the beam member 40 is supported in a vertical direction in a non-contact type. <P>COPYRIGHT: (C)2009,JPO&INPIT |
