| 摘要 |
Mechanical venting arrangements for cracking the seal of a substrate container. In one substrate container, mechanical venting is provided by a rocker arm that is rotationally held in a configuration that seals a venting aperture when the door and cover of the substrate container are latched together. The rocker arm is biased, by gravity and/or by active biasing, to an open or vented configuration upon decoupling of the door and cover of the substrate container. In another substrate container, mechanical venting is provided by a sliding actuator valve assembly that is passively actuated by a latch of the substrate container. A sliding actuator drives a plunger assembly to close a venting aperture of the substrate container. Upon release of the latch, energy stored in a biasing element within the plunger assembly drives the sliding actuator into a retracted configuration, thereby opening the venting aperture. |
