发明名称 METHOD FOR MANUFACTURING MAGNETORESISTIVE EFFECT ELEMENT AND MAGNETIC HEAD
摘要 The present invention provides a magnetoresistive effect element comprising an insulating layer formed of MgO, and a magnetic head using the magnetoresistive effect element. A construction of a cap layer, which causes neither layer separation at the interface of an MgO film nor liftoff defects in lead core width formation, is provided to provide a method for manufacturing a magnetoresistive effect element and a magnetic head, which can realize the manufacture of high-quality magnetic heads, MRAMs and the like while preventing the occurrence of yield. The method for manufacturing a magnetoresistive effect element and the method for manufacturing a magnetic head comprise the step of forming a first cap layer on a magnetoresistive effect element including an insulating layer formed of MgO, the step of forming a second cap layer on the first cap layer, the step of then conducting pin annealing treatment, and the step of removing the second cap layer after the pin annealing treatment.
申请公布号 WO2009004714(A1) 申请公布日期 2009.01.08
申请号 WO2007JP63266 申请日期 2007.07.03
申请人 FUJITSU LIMITED;HASHIMOTO, JUNICHI 发明人 HASHIMOTO, JUNICHI
分类号 H01L43/10;H01L43/08;H01L43/12 主分类号 H01L43/10
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