PRESSURE SENSING ELEMENT AND PRESSURE SENSOR

摘要

Provided is a pressure sensing element configured to be flexible, and capable of demonstrating a stable electrical reliability over a long period; and, a pressure sensor having such pressure sensing element. A pressure sensing element (100) has an electro-conductive pressure sensing film (14), a sensor electrode (12) provided at a position faced to the pressure sensing film (14), and an insulating layer (13) which creates a predetermined distance “A” between the pressure sensing film (14) and the sensor electrode (12) so as to keep them apart from each other, the pressure sensing film (14) being a resin film containing carbon particles (140); and, a pressure sensor (200) has the pressure sensing element (100), and a detection unit (210) which is electrically connected with the pressure sensing element (100) so as to detect contact resistance between the pressure sensing film (14) and the sensor electrode (12).

主权项

1. A pressure sensing element comprising:
an electro-conductive pressure sensing film; a sensor electrode provided at a position faced to the pressure sensing film; and an insulating layer which creates a predetermined distance between the pressure sensing film and the sensor electrode so as to keep them apart from each other, the pressure sensing film being a resin film containing carbon particles.