| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compound sensor for detecting angular velocity and acceleration, capable of accurately detecting the angular velocity and the acceleration, wherever its rotating center may be located on an XY plane which is parallel to a substrate. <P>SOLUTION: The compound sensor for detecting the angular velocity and the acceleration is equipped with a processing circuit 40, which processes output signals from a first acceleration detecting sensor 21, a second acceleration detecting sensor 22 and a third acceleration detecting sensor 23, thereby detecting the acceleration, and by calculating the output signals, the angular velocity is obtained. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
