| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of yielding desired characteristics relatively easily, and a liquid injection head equipped with the piezoelectric element; and to provide a manufacturing method of the piezoelectric element capable of controlling the crystal orientation of a piezoelectric layer relatively easily. <P>SOLUTION: The piezoelectric element comprises a lower electrode 60 provided on one direction side of a substrate, a piezoelectric substance layer 70 provided on the lower electrode, and an upper electrode provided on the piezoelectric substance layer. In the piezoelectric element, at least the uppermost layer 63 of the lower electrode is preferentially oriented to a (111) plane and comprises an iridium layer where orientations other than the (111) plane are existent, and the piezoelectric substance layer is directly formed on the lower electrode and is preferentially oriented to a (100) plane. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
