| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device capable of performing exposure in a short time with small reverse exposure to reflected ultraviolet light. <P>SOLUTION: The exposure device 1 has an external box 3a, in which an internal box 3b is provided. The internal box 3b is provided with shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, and a light shield plate 17. A film which absorbs ultraviolet light is provided on surfaces of the shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, the internal box 3b, and the light shield plate 17 and when the shield plates 7a, 7b, 7c, 7d, 7e, 7f, 7g, 7h, 7i, 7j, 7k, and 7l, the internal box 3b, and the light shield plate 17 are irradiated with ultraviolet light emitted by a lamp 9a, the majority is absorbed by the films. <P>COPYRIGHT: (C)2007,JPO&INPIT |
