PROCESS FOR FABRICATING ALUMINIUM NITRIDE, AND ALUMINIUM NITRIDE WAFER AND POWDER

摘要

The invention relates to a process for fabricating aluminium nitride in which a multilayer structure comprising aluminium-based laminated products are prepared by stacking or winding them and said multilayer structure is heated in a nitrogen-containing atmosphere, most of the nitriding taking place during a phase in which the temperature of the nitrogen-containing atmosphere is maintained between 400°C and 660°C. The invention makes it possible to obtain aluminium nitride by an economic process that requires neither the use of aluminium powder as raw material nor the use of very high temperatures. The aluminium nitride obtained comprises particles the microscopic structure of which is laminated.