| 摘要 |
A track apparatus for a flat panel display device is provided to correct CD(Critical Dimension) non-uniformity caused by developer connection time difference by controlling temperature of heat transmitted from a heating plate to a substrate, thereby improving uniformity of the CD. A heating plate(25) is disposed within a process chamber. A heat emitting body(26) is disposed within the heating plate. Plural substrate support pins(24a,24b) are disposed in an upper surface of the heating plate, and have different heights according to a scan direction of a slit nozzle. In the substrate support pin, a pre-operation area by the scan direction of the slit nozzle has a height lower than a post-operation area. |
