| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method, inspection equipment and a laminated substrate, for inspecting whether or not an edge material portion of a first substrate is removed.SOLUTION: In a method for inspecting whether or not an edge material portion is removed from a laminated substrate, as a step S1, a mark is formed on an edge material portion, as a step S2, a laminated substrate is imaged after a removal step of the edge material portion, as a step S3, the presence of the mark is determined according to an imaging result of the step S2, and if it is determined at the step S3 that the mark exists in image data, a notification operation is performed at a step S4.SELECTED DRAWING: Figure 4 |
