MEMS THERMAL FLOW SENSOR WITH COMPENSATION FOR FLUID COMPOSITION
摘要
The present invention provides a MEMS thermal flow sensor or meter for measuring the flow rate of a fluid without need for calibration of the flow sensor for that particular fluid. A response curve is determined by plotting the sensor output voltage against the volume flow rate divided by fluid thermal diffusivity for a calibration fluid of known thermal diffusivity, and storing response curve data in memory. A conversion factor is employed to provide a measure of correct flow rate of an unknown fluid. This conversion factor is derived from the ratio of the thermal time constant of the calibration fluid to the thermal time constant of the measured fluid, the time constants being measured at zero flow. These time constants are stored in memory.
申请公布号
WO2016137826(A1)
申请公布日期
2016.09.01
申请号
WO2016US18589
申请日期
2016.02.19
申请人
MEMSIC, INC.
发明人
MAGINNIS, Thomas, O.;PERN, Nan, Jou;ZHAO, Zhengxin;CAI, Yongyao;ZHAO, Yang