| 摘要 |
A scanning electron microscope is provided which can achieve an improved detection efficiency in the detection of secondary electrons without affecting an electron beam for irradiating a specimen, and which is suitable for detecting specific secondary electrons in a specific energy range. Secondary electrons 14 generated by irradiation of specimen 8 with electron beam 4 are decelerated by a decelerating electrical field formed by a pair of electrodes 10, 11 of field generation unit 28. Thereby, a portion of secondary electrons having a low energy is repelled. Other secondary electrons not having been repelled are deflected by a deflecting electrical field formed between the pair of electrodes as well as by a deflecting magnetic field which is orthogonal to the deflecting electrical field, to be detected by secondary electron detector 12. However, a portion of secondary electrons having a higher energy which could not have been deflected by the deflecting electrical field and deflecting magnetic field cannot be detected by secondary electron detector 12.
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