| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prepare required reticles in time by collecting the housing condition of the reticle in an aligner before preparation and taking the use limit of reticle into account. <P>SOLUTION: The reticle preparation system is provided with semiconductor board exposure systems 7a and 7b that are connected with a host computer 1 through a communication line 6 to efficiently prepare reticles, on the basis of a reticle housing information collected by the host computer 1 from the semiconductor board exposure systems 7a and 7b and use limit frequency set to the reticle, when a production lot is subject to the semiconductor board aligners 7a and 7b; an output terminal 8 connected with the host computer 1 through the communication line 6; and reticle housing shelves 10a and 10b connected with the host computer 1 through the communication line 9. Before the reticle is put into the semiconductor board aligners 7a and 7b, an empty shelf is ensured, and one not exceeding the use limit frequency is selected, thereby realizing efficient preparation of the reticle. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
