HEATER UNIT AND APPARATUS FOR MANUFACTURING/INSPECTING SEMICONDUCTOR DEVICE OR FLAT PANEL DISPLAY PROVIDED WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a heater unit which is used in an apparatus for manufacturing/inspecting a semiconductor device or a flat display panel and is capable of shortening the time required for temperature change of temperature rising and cooling and minimizing the generation of particles. SOLUTION: The heater unit comprises a heater plate 1 for loading and heating an object to be heated, a movable cooling plate 2 to be abutted on the heater plate 1 to cool it and a container 3 for housing them. An elastic inclusion 5 such as an O ring made of a resin or rubber is arranged on the back surface of the cooling plate 2 or the bottom surface of the container 3 so that the movable cooling plate 2 is not brought into contact with the container 3 at the lowest point. COPYRIGHT: (C)2009,JPO&INPIT