METHOD OF MANUFACTURING MAGNETIC FIELD DETECTION DEVICE

摘要

A method for manufacturing a magnetic filed sensing device is provided to detect a bio molecular material on a magnetic bio sensor chip by operating a magnetic field sensing device stably. A large magnetic resistance thin film is deposited on a substrate(1). A magnetic resistance device(20) with a circular ring structure is formed by etching the large magnetic resistance thin film. A metal thin film layer of Au material is deposited on the substrate and the magnetic resistance device. An electrode pad(24) is formed by a dry etching method and a lift up method using a negative light sensitive mask. An insulator thin film layer is deposited on the substrate, the magnetic resistance device, and the electrode pad. An insulator protective layer(28) is formed by partially removing the insulator thin film layer. The light sensitive magnetic bead thin film is deposited on the substrate, the electrode pad, and the insulator protective layer. A magnetic bead confining layer(32) is formed by selectively removing the light sensitive magnetic bead thin film.