| 摘要 |
PURPOSE: A vacuum valve and a closure plate for the same are provided to reduce the amount of the free material particle. CONSTITUTION: A back side(15) is materially parallel in an occlusion side(26). An occlusion surface(13) gas-tight seals a flow path with the sealing contact of the valve seat surface with a valve operation part(6). A shielding plate(11) faces the shielding side thereof to an opening side. The shielding plate includes one or more first rod recess. A fastening unit detachably couples a connection part of a thrust rod(7) in the first rod recess.
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