| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine droplet generator enabled to properly perform the injection of homogeneous fine droplets at a set flow rate of a liquid material, so that a precise mass flow rate control can be performed at a next step.SOLUTION: A fine droplet generator A comprises: a flow rate control part B for feeding out a liquid material L at a constant rate; and a liquid material supply part C for changing the liquid material L from the flow rate control part B, into minute liquid droplets S continuing in a pulse state, thereby to feed the minute liquid droplets S to a next step. The liquid material supply part C includes: a main passage 55 derived from the flow rate control part B; branch passages 55a and 55b branched from the main passage 55 and connected to a next step; and on-off valves V1 and V2 individually disposed in the branch passages 55a and 55b and controlled to repeat high speed valve opening and closing, and so controlled that either of the branch passages 55a and 55b may be opened.SELECTED DRAWING: Figure 1 |
