发明名称 |
Method of making a semiconductor device having a voltage withstanding PMOSFET semiconductor structure and an NMOSFET semiconductor structure |
摘要 |
<p>The method involves producing an N-doped well in a P-doped semiconductor substrate by high-voltage ion implantation. An N-doped channel region between a P-doped source region and a P-doped drain region, is produced in a P-doped inner zone of the N-doped well. The regions are arranged such that the P-doped inner zone of the N-doped well remains as a drift zone between the channel and drain regions.</p> |
申请公布号 |
EP1670052(A1) |
申请公布日期 |
2006.06.14 |
申请号 |
EP20040029015 |
申请日期 |
2004.12.08 |
申请人 |
PREMA SEMICONDUCTOR GMBH |
发明人 |
GRUETZEDICK HARTMUT DR.;SCHEERER JOACHIM DR. |
分类号 |
H01L21/8238;H01L21/225;H01L21/266;H01L21/336;H01L21/761;H01L27/092;H01L29/10;H01L29/78 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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