发明名称 Method of making a semiconductor device having a voltage withstanding PMOSFET semiconductor structure and an NMOSFET semiconductor structure
摘要 <p>The method involves producing an N-doped well in a P-doped semiconductor substrate by high-voltage ion implantation. An N-doped channel region between a P-doped source region and a P-doped drain region, is produced in a P-doped inner zone of the N-doped well. The regions are arranged such that the P-doped inner zone of the N-doped well remains as a drift zone between the channel and drain regions.</p>
申请公布号 EP1670052(A1) 申请公布日期 2006.06.14
申请号 EP20040029015 申请日期 2004.12.08
申请人 PREMA SEMICONDUCTOR GMBH 发明人 GRUETZEDICK HARTMUT DR.;SCHEERER JOACHIM DR.
分类号 H01L21/8238;H01L21/225;H01L21/266;H01L21/336;H01L21/761;H01L27/092;H01L29/10;H01L29/78 主分类号 H01L21/8238
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