Positioning device with two linear motors inclined relative to each other

摘要

The positioning device has hydrostatic/hydrodynamics bearings on which a carriage (10) is displaceable. A carriage drive for moving the carriage, consists of linear motors having respective primary and secondary portions (20a,21a,20b,21b). The motors are arranged in inclined positions such that the motors are positioned in mutually different intersecting planes.