VAPORIZER DELIVERY AMPULE

摘要

PROBLEM TO BE SOLVED: To provide a vaporizer system and method that efficiently vaporizes a solid and/or liquid chemical source.SOLUTION: There is provided a vaporizing device 10 including: an ampule 12 having an ampule upper end part 18; a gas outlet 40 connected to the ampule upper end part 18; an ampule side wall 16 sealing the inside; a gas outlet 20 for introducing a gas into the inside so that the gas flows through up to the gas outlet 40; and at least one container 22 in the inside 20 through which the gas flows and which has a porous plane for holding a solid vaporization material.