发明名称 Nitride semiconductor laser element
摘要 A nitride semiconductor laser element, comprises a substrate and a nitride semiconductor layer in which a first semiconductor layer, an active layer, and a second semiconductor layer are laminated in this order on the substrate, wherein recessed and raised portions are formed in the first semiconductor layer and/or the second semiconductor layer, a semiconductor layer that embeds the recessed and raised portions are formed on the semiconductor layer in which said recessed and raised portions are formed, the semiconductor layer in which the recessed and raised portions are formed is equipped with a side face having a first region extending downward and a second region extending farther downward continuously from the first region, and the second region has a greater slope with respect to the normal direction of the substrate than the first region.
申请公布号 US2008029770(A1) 申请公布日期 2008.02.07
申请号 US20070812007 申请日期 2007.06.14
申请人 NICHIA CORPORATION 发明人 MASUI SHINGO;TSUKAYAMA KAZUTAKA
分类号 H01S5/22;H01S5/343 主分类号 H01S5/22
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