| 发明名称 |
Preparative method for protective layer of susceptor |
| 摘要 |
A protective layer for a susceptor is prepared. The susceptor is a graphite block; and the protective layer consists of a titanium nitride film and a titanium carbide film. The susceptor with the protective layer is used in epitaxial growth and device process with life time prolonged, energy saved, and cost reduced.
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| 申请公布号 |
US2008050522(A1) |
申请公布日期 |
2008.02.28 |
| 申请号 |
US20060508235 |
申请日期 |
2006.08.23 |
| 申请人 |
ATOMIC ENERGY COUNCIL-INSTITUTE OF NUCLEAR ENERGYRESEARCH |
发明人 |
YANG TSUN-NENG;LAN SHAN-MING;CHEN YING-RU;CHIANG CHIN-CHEN;CHIU HUNG-SHENG |
| 分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
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