发明名称 ELECTROMECHANICAL ACTUATORS AND MANUFACTURING METHOD THEREOF
摘要 An electromechanical actuator comprises a bimorph element (10) of an electromechanical material. The bimorph element (10) is controllably bendable in a first direction (15) by application of three voltage potentials to electrodes (41, 42, 43) of the bimorph element (10). The electromechanical actuator further comprises three conductive film areas (55, 56, 57) provided at a first side (51) of the bimorph element (10), which first side (51) is parallel to the first direction (15). The three conductive film areas (55, 56, 57) are electrically decoupled from each other. Furthermore, each of the three conductive film areas (55, 56, 57) is connected to at least one respective one of the electrodes (41, 42, 43). A method for manufacturing such an electromechanical actuator is also disclosed.
申请公布号 US2010019622(A1) 申请公布日期 2010.01.28
申请号 US20080177399 申请日期 2008.07.22
申请人 PIEZOMOTOR UPPSALA AB 发明人 JOHANSSON STEFAN
分类号 H01L41/083 主分类号 H01L41/083
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