| 摘要 |
PROBLEM TO BE SOLVED: To improve input efficiency of microwave by increasing microwave from a wave guide to a cavity resonator, and to reduce the total size of a device by disusing a large-sized water cooled system. SOLUTION: A cavity resonator 3 is located at the side surface part perpendicular to the longitudinal direction of a wave guide 2, and a microwave introduction promoting part 4 promoting the introduction of microwave from the wave guide 2 into the cavity resonator 3 is installed at a connecting part of the wave guide 2 and the cavity resonator 3. The microwave, introduced from the wave guide 2 into the cavity resonator 3, is promoted its introduction by the microwave introduction promoting part 4, and the incidence of microwave loss and the generation of heat caused by the microwave loss is reduced. Owing to the above, an overheat caused by the heat generation is prevented and a large-sized water cooling system is disused, consequently, total size of the ECR microwave discharge ion generator is reduced. |
