SCANNING TYPE PROBE MICROSCOPE AND PROBE MOVING CONTROL METHOD THEREFOR

摘要

The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12, an optical lever type optical detection device etc. measuring the atomic force etc. occurring between the probe tip and sample when the probe tip scans the surface of the sample, and X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 relatively changing the positions of the probe tip and sample, the measurement part maintaining the physical quantity constant while the movement mechanism makes the probe tip scan the surface of the sample so as to measure the surface of the sample, and changes an approach direction of the probe tip when a movement direction making the probe tip approach the sample surface and a reaction force direction when the probe tip contacts the sample surface differ by at set value or more. Due to this configuration, it is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.