| 发明名称 |
MULTIPLE-WAVELENGTH LASER MICROMACHINING OF SEMICONDUCTOR DEVICES |
| 摘要 |
<p>A specially shaped laser pulse energy profile (98, 104, 156) characterized by different laser wavelengths at different times of the profile provides reduced, controlled jitter to enable semiconductor device micromachining that achieves high quality processing and a smaller possible spot size.</p> |
| 申请公布号 |
KR20070089150(A) |
申请公布日期 |
2007.08.30 |
| 申请号 |
KR20077013049 |
申请日期 |
2007.06.08 |
| 申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
SUN YUNLONG;BRULAND KELLY;HAINSEY ROBERT F.;HARRIS RICHARD;JORDENS WILLIAM J.;LO HO WAI;SUN LEI |
| 分类号 |
H01L21/321 |
主分类号 |
H01L21/321 |
| 代理机构 |
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