| 发明名称 |
NANO-ELECTRODE-ARRAY FOR INTEGRATED CIRCUIT INTERCONNECTS |
| 摘要 |
An integrated circuit is provided including an integrated circuit having a trench and via provided in a dielectric layer. A nano-electrode-array is over the dielectric layer in the trench and via, and a conductor is over the nano-electrode-array. The conductor and the nano-electrode-array are coplanar with a surface of the dielectric layer.
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| 申请公布号 |
US2007284746(A1) |
申请公布日期 |
2007.12.13 |
| 申请号 |
US20070742328 |
申请日期 |
2007.04.30 |
| 申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
LOPATIN SERGEY D.;FIORDALICE ROBERT;PINTCHOVSKI FAIVEL;IVANOV IGOR;KONG WEN Z.;KOLICS ARTUR |
| 分类号 |
H01L21/82 |
主分类号 |
H01L21/82 |
| 代理机构 |
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