| 摘要 |
<p>A shape measuring machine 100 which measures the shape of an object to be measured by bringing the surface of a probe 124 into direct contact with the object to be measured 102 has a photocatalyst film 124b on the tip end surface of the probe 124. The shape measuring machine 100 may be provided with a light source for activating the photocatalyst film 124b. The photocatalyst film 124b may have a metal oxide. The photocatalyst film 124b may contain at least one of carbon and nitrogen. Thereby, organic contamination can be removed by subjecting the surface to self cleaning due to decomposition of organic substances and such dirt that requires cleaning can also be easily removed by controlling the hydrophilic property.</p> |
