| 摘要 |
<p>An organic EL device which can retain excellent luminescent efficiency over long, especially a top emission organic EL device. The organic EL device is characterized in that it comprises a substrate and an organic EL element formed on the substrate, that the organic EL element comprises a lower electrode, an organic EL layer, an upper electrode, and a protective layer, and that the protective layer is constituted of one or more inorganic films. It is further characterized in that at least one of the one or more inorganic films is an SiN:H film, and that the SiN:H film gives an infrared absorption spectrum in which the stretching-mode peak area ratio of the N-H bond to the Si-N bond in the SiN:H film is 0.06-0.1, excluding 0.06, and the stretching-mode peak area ratio of the Si-H bond to the Si-N bond is 0.12-0.17, excluding 0.12.</p> |
