发明名称 |
METHOD FOR PRODUCING POLISHED OBJECT AND POLISHING COMPOSITION KIT |
摘要 |
[Problem] To provide a method for producing a polished object, which can remarkably reduce a haze level on a surface of the object to be polished while defects are significantly reduced. [Solution] A method for producing a polished object, which includes a double-side polishing step in which an object to be polished is subjected to double-side polishing using a double-side polishing composition including first abrasive grains having an average primary particle diameter of 40 nm or more and a nitrogen-containing water-soluble polymer to obtain a double-side polished object; and a single-side polishing step in which the double-side polished object is subjected to single-side polishing using a single-side polishing composition including second abrasive grains having an average primary particle diameter of 40 nm or less and a water-soluble polymer, and in which a ratio of an average primary particle diameter (A) of the first abrasive grains with respect to an average primary particle diameter (B) of the second abrasive grains (A)/(B) is more than 1 and 2.5 or less. |
申请公布号 |
SG10201608517V(A) |
申请公布日期 |
2016.12.29 |
申请号 |
SG10201608517V |
申请日期 |
2014.06.12 |
申请人 |
FUJIMI INCORPORATED |
发明人 |
TABATA, MAKOTO;TAKAMI, SHINICHIRO;IDE, SHOGAKU |
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