发明名称 Laser synthesized ceramic electronic devices and circuits and method for making
摘要 Laser apparatus and methods are provided for synthesizing areas of ceramic substrates or thin films, such ceramics as Silicon Carbide and Aluminum Nitride, to produce electronic devices and circuits as integral electron circuit components thereof. Circuit components such as conductive tabs, interconnects, wiring patterns, resistors, capacitors, insulating layers and semiconductors are synthesized on the surfaces and within the body of such ceramics. Selected groupings and arrangements of these electronic circuit components within the substrates or thin films provide a wide range of circuits for applications such as digital logic elements and circuits, transistors, sensors for measurements and monitoring effects of chemical and/or physical reactions and interactions of materials, gases, devices or circuits that may utilize sensors. The electronic elements and components offer the advantages of providing thermal compatibilities vith the substrate, since they are an integral part thereof and consequently are compatible therewith regarding thermal coefficients of expansion and thermal dissipation.
申请公布号 US6025609(A) 申请公布日期 2000.02.15
申请号 US19980088045 申请日期 1998.06.01
申请人 QUICK, NATHANIEL R. 发明人 QUICK, NATHANIEL R.
分类号 C23C16/04;H01L21/04;H01L21/20;H01L21/48;H01L21/768;H01L21/82;H01L23/525;H05K3/10;(IPC1-7):H01L31/031 主分类号 C23C16/04
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