| 摘要 |
A system for exposing a target material to small particles. The system includes an exposure chamber that receives the target material. A stream of charged particles is directed via an inlet into the exposure chamber toward the target material. One or more electrodes are located relative to the target material and the inlet, and are electrically charged, so as to cause at least some of the charged particles to impact upon the target material. The system can be used to expose the target material to small, for example, nanoscale, particles in a gas environment.
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