发明名称 Laser beam machining apparatus
摘要 A laser beam machining apparatus includes: a laser beam oscillator; a beam adjusting unit which is disposed between the laser beam oscillator and a condenser lens and by which the beam diameter and the divergence angle of the laser beam oscillated from the laser beam oscillator are adjusted; and a beam diameter and divergence angle detecting unit for detecting the beam diameter and the divergence angle of the laser beam having passed through the beam adjusting unit. The laser beam machining apparatus further includes a control unit which computes the beam diameter and the divergence angle of the laser beam oscillated from the laser beam oscillator, based on detection signals from the beam diameter and divergence angle detecting unit, and which controls the beam adjusting unit, based on the computed beam diameter and divergence angle of the laser beam oscillated from the laser beam oscillator and the beam diameter and the divergence angle of the laser beam incident on the beam diameter and divergence angle detecting unit.
申请公布号 US2008169274(A1) 申请公布日期 2008.07.17
申请号 US20080006565 申请日期 2008.01.03
申请人 DISCO CORPORATION 发明人 SAWABE TAIKI;NOMARU KEIJI
分类号 B23K26/38;B23K26/02 主分类号 B23K26/38
代理机构 代理人
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