| 摘要 |
A tray is provided between a supply air port member and an exhaust port member. A peripheral edge portion of an opening portion of an exhaust port of the exhaust port member that faces an output chamber side is a conical guiding portion. A spherical body is disposed between the guiding portion and an inner bottom face of a tray. The inner peripheral wall of the tray fits slidably into the outer peripheral surface of the end portion of the exhaust port member that is positioned within the output chamber. The other end of the poppet valve is caused to contact the outer bottom face of the tray. Through this, the exhaust port and the stopping component (spherical body) are centered automatically at the position of the center of the exhaust port , regardless of the position of the shaft axis of the poppet valve, so that there will be essentially no sliding friction. |
