发明名称 |
PRESSURE SENSOR WITH REAL TIME HEALTH MONITORING AND COMPENSATION |
摘要 |
A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. |
申请公布号 |
EP2962079(A4) |
申请公布日期 |
2016.11.02 |
申请号 |
EP20140757769 |
申请日期 |
2014.02.14 |
申请人 |
MKS INSTRUMENTS, INC. |
发明人 |
GU, LEI;LUCAS, PAUL D.;BART, STEPHEN F.;SULLIVAN, PHILIP W. |
分类号 |
G01L7/08;G01L9/00;G01L13/02;G01L27/00 |
主分类号 |
G01L7/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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