发明名称 |
CURABLE COMPOSITION AND CURED PRODUCT THEREOF, METHOD FOR PRODUCING CURED PRODUCT, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT |
摘要 |
To provide a curable composition for nanoimprinting that can form a cured product that has a sufficiently cured surface and is less prone to a pattern collapse defect even when the curable composition is cured by a photo-nanoimprint method at a low exposure dose. To provide a nanoimprint method for forming such a cured product. To provide a cured product that is less prone to a pattern collapse defect even when cured at a low exposure dose, a method for producing such a cured product, a method for manufacturing an optical component, a method for manufacturing a circuit board, and a method for manufacturing an electronic component. A curable composition that satisfies the formula (1) in a cured state: Er1/Er2 ≧ 1.10 (1) wherein Er1 denotes the surface reduced modulus (GPa) of a cured product of the curable composition, and Er2 denotes the internal reduced modulus (GPa) of the cured product. |
申请公布号 |
SG11201609356R(A) |
申请公布日期 |
2016.12.29 |
申请号 |
SG11201609356R |
申请日期 |
2015.04.28 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KATO, JUN;KAWASAKI, YOUJI;YONEZAWA, SHIORI;ITO, TOSHIKI |
分类号 |
B29C59/02;C08F2/50;H01L21/027;H01L21/3065 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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