发明名称 CURABLE COMPOSITION AND CURED PRODUCT THEREOF, METHOD FOR PRODUCING CURED PRODUCT, METHOD FOR MANUFACTURING OPTICAL COMPONENT, METHOD FOR MANUFACTURING CIRCUIT BOARD, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
摘要 To provide a curable composition for nanoimprinting that can form a cured product that has a sufficiently cured surface and is less prone to a pattern collapse defect even when the curable composition is cured by a photo-nanoimprint method at a low exposure dose. To provide a nanoimprint method for forming such a cured product. To provide a cured product that is less prone to a pattern collapse defect even when cured at a low exposure dose, a method for producing such a cured product, a method for manufacturing an optical component, a method for manufacturing a circuit board, and a method for manufacturing an electronic component. A curable composition that satisfies the formula (1) in a cured state: Er1/Er2 ≧ 1.10 (1) wherein Er1 denotes the surface reduced modulus (GPa) of a cured product of the curable composition, and Er2 denotes the internal reduced modulus (GPa) of the cured product.
申请公布号 SG11201609356R(A) 申请公布日期 2016.12.29
申请号 SG11201609356R 申请日期 2015.04.28
申请人 CANON KABUSHIKI KAISHA 发明人 KATO, JUN;KAWASAKI, YOUJI;YONEZAWA, SHIORI;ITO, TOSHIKI
分类号 B29C59/02;C08F2/50;H01L21/027;H01L21/3065 主分类号 B29C59/02
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