| 摘要 |
A device for sucking a fluid, constituted of a set of suction source unit, sets of suction inlet units, and piping lines connecting the suction source unit and the suction inlet units. Valve mechanisms individually increasing resistance in flow paths are provided in the middles of the piping lines. When the magnitudes of gaps between openings of some of the suction inlet units and an object surface are reduced, negative pressures inside the some suction inlet units increase and the some suction inlet units strongly suction-adhere to the object surface. On the other hand, when the magnitudes of gaps between openings of the other suction inlet units and the object surface are increased, negative pressures inside the other suction inlet units reduce and the other suction inlet units weakly suction-adhere to the object surface or separate from the object surface.
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