| 发明名称 |
Inspection of transparent substrates for defects |
| 摘要 |
Methods, apparatus and systems for the detection of defects in transparent substrates such as glass sheets are disclosed. The methods, apparatus and systems are capable of detecting optical path length variations in transparent substrates smaller than 100 nm.
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| 申请公布号 |
US2006192952(A1) |
申请公布日期 |
2006.08.31 |
| 申请号 |
US20060414076 |
申请日期 |
2006.04.28 |
| 申请人 |
GAHAGAN KEVIN T;HILTNER JASON F |
发明人 |
GAHAGAN KEVIN T.;HILTNER JASON F. |
| 分类号 |
G01N21/88;G01N21/41;G01N21/896;G01N21/95 |
主分类号 |
G01N21/88 |
| 代理机构 |
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