PICK AND PLACE UNIT IN SINGULATION HANDLER

摘要

A singulation handler for sorting and transferring a semiconductor material is provided to produce a semiconductor chip of a predetermined size only by changing a computer program. A picker unit(100) absorbs and picks up a semiconductor material transferred from a sawing unit to a transfer unit of a singulation handler by a robot. An interval between plural pickers(100a to 100e) of the picker unit is adjusted by a picker interval adjuster(200). The picker unit is moved down in a predetermined depth by a placer(300). A robot(500) has a pair of driving ball screws, in which one ball screw transfers a semiconductor material absorbing unit(600) to a tray supply/withdrawing unit and the other ball screw is provided with a vibration damping block having the same weight as the semiconductor material absorbing unit.