ILLUMINATION OPTICAL SYSTEM, MICROSCOPE, IMAGE PROCESSING DEVICE, CONTROL METHOD FOR MICROSCOPE, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide appropriate correction for distortion caused by asymmetry of illumination.SOLUTION: An illumination optical system includes: first illumination means configured to illuminate an object with an interference pattern formed by two parallel light rays that are coherent to each other passing through positions that are asymmetrical about an optical axis on a pupil plane, and a Dove prism unit 905 configured to rotate the two parallel light rays about the optical axis in steps of 360/n degrees (n is an integer greater than 1).SELECTED DRAWING: Figure 1