发明名称 Forming Nanotubes
摘要 A method of forming nanotubes may comprise applying a photoresist to a metal substrate, selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation, removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate, exposing the first portion of the metal substrate to an etchant removing the first portion of the photoresist exposing a second portion of the metal substrate, and growing carbon nanotubes on the second portion of the metal substrate.
申请公布号 US2016217962(A1) 申请公布日期 2016.07.28
申请号 US201514607533 申请日期 2015.01.28
申请人 Eloret Corporation 发明人 Oye Michael Mikio
分类号 H01J9/02;H01J1/304 主分类号 H01J9/02
代理机构 代理人
主权项 1. A method of forming nanotubes, comprising: applying a photoresist to a metal substrate; selectively exposing a first portion of the photoresist to electromagnetic radiation while not exposing a second portion to the electromagnetic radiation; removing the second portion of the photoresist from the metal substrate exposing a first portion of the metal substrate; exposing the first portion of the metal substrate to an etchant; removing the first portion of the photoresist exposing a second portion of the metal substrate; and growing carbon nanotubes on the second portion of the metal substrate.
地址 Moffett Field CA US