| 发明名称 |
CONVEYING HAND AND LITHOGRAPHY APPARATUS |
| 摘要 |
This conveying hand is used for conveying a conveyed object in an adsorbed state with a negative pressure, and comprises a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in the direction of gravity of the conveyed object and restricts a movement of the pad on the base in the direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity. |
| 申请公布号 |
US2016243707(A1) |
申请公布日期 |
2016.08.25 |
| 申请号 |
US201615049445 |
申请日期 |
2016.02.22 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Matsuhira Yasunao |
| 分类号 |
B25J15/06;H01L21/677;G03F7/20;H01L21/683 |
主分类号 |
B25J15/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A conveying hand for conveying a conveyed object in an adsorbed state with a negative pressure comprising:
a pad having a contact portion that contacts the conveyed object and a concave portion having an internal space that can be evacuated; a base that moves while loading the pad; a first elastic member that movably supports the pad on the base in a direction of gravity of the conveyed object and restricts a movement of the pad with respect to the base in a direction perpendicular to the direction of gravity; and a second elastic member that seals a space communicating with the internal space of the concave portion and movably supports the pad on the base in the direction of gravity. |
| 地址 |
Tokyo JP |
